October 17, 2025
A quartz boat is a type of boat-shaped device made of high-purity quartz material, which is resistant to high temperatures and corrosion. Due to its unique physical and chemical properties, it has extensive applications in various high-tech and industrial fields.
Core Characteristics (Key Properties)
1.High Temperature Resistance: Capable of withstanding temperatures above 1000°C, suitable for semiconductor diffusion, oxidation and other processes.
2.Chemical Inertness: Highly resistant to strong acids (except hydrofluoric acid and phosphoric acid) and corrosive gases.
3.Low Thermal Expansion Coefficient: Ensures dimensional stability at high temperatures, preventing silicon wafers or crystals from deforming.
4.High Purity: Extremely low metal impurity content (such as strict control of hydroxyl content), meeting the requirements of semiconductor applications.
The following are its main application fields and technical features:
一、Semiconductor manufacturing:
1. Silicon wafer support and transportation: During the chip manufacturing process, the quartz boat is used to hold the silicon wafer. It remains stable during high-temperature processes (such as diffusion, oxidation, and annealing) to prevent contamination or deformation, ensuring the quality of the chips.
2. Etching and diffusion processes: As a key component of the etching machine chamber or sample holder, the quartz boat enables the diffusion of elements such as boron and phosphorus in a quartz furnace tube at around 1000°C, directly influencing the feature size of integrated circuits.
二、Photovoltaic industry
1. Manufacturing of solar panels: The quartz boat is used to hold photovoltaic materials, capable of withstanding high-temperature treatment and corrosive solutions, thereby enhancing the photoelectric conversion efficiency and service life of solar cells.
2. Silicon wafer diffusion process: The new type of photovoltaic quartz boat is designed with adjustable features to accommodate silicon wafers of different sizes, and is enhanced in cleanliness through separate cleaning, thereby optimizing the uniformity of diffusion.
三、Chemical Engineering and Metallurgy
1.Corrosion-resistant reaction vessel: As an inner lining for reaction tanks and evaporators, or as a transfer device, the quartz boat can withstand high temperatures, high pressures, and strong acids and alkalis, ensuring the stable operation of chemical equipment.
2. Acidic solution treatment: Applied to combustion and cooling devices for high-temperature
acid-resistant gases, as well as for the evaporation and storage of acidic solutions.
The core advantage of the quartz boat lies in its high temperature resistance (up to over 1000℃), corrosion resistance (able to withstand strong acids and strong alkalis), and high light transmittance. These characteristics make it an indispensable tool in high-end manufacturing fields such as semiconductors and photovoltaics.